Electrical and structural properties of In-implanted Si1-xGex alloys

R. Feng, F. Kremer, D. J. Sprouster, S. Mirzaei, S. Decoster, C. J. Glover, S. A. Medling, J. L. Hansen, A. Nylandsted-Larsen, S. P. Russo, M. C. Ridgway

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    Material Science