TY - JOUR

T1 - Electron energy probability function and L-p similarity in low pressure inductively coupled bounded plasma

AU - Chatterjee, Sanghamitro

AU - Bhattacharjee, Sudeep

AU - Charles, Christine

AU - Boswell, Rod

N1 - Publisher Copyright:
© 2015 Chatterjee, Bhattacharjee, Charles and Boswell.

PY - 2015/2/24

Y1 - 2015/2/24

N2 - Particle-In-Cell (PIC) simulations are carried out to investigate the effect of discharge length (L) and pressure (p) on Electron Energy Probability Function (EEPF) in a low pressure radio frequency (rf) inductively coupled plasma (ICP) at 13.56 MHz. It is found that for both cases of varying L (0.1-0.5 m) and p (1-10 mTorr), the EEPF is a bi-Maxwellian with a step in the bounded direction (x) and non-Maxwellian with a hot tail in the symmetric unbounded directions (y, z). The plasma space potential decreases with increase in both L and p, the trapped electrons having energies in the range 0-20 eV. In a conventional discharge bounded in all directions, we infer that L and p are similarity parameters for low energy electrons trapped in the bulk plasma that have energies below the plasma space potential (eVp). The simulation results are consistent with a particle balance model.

AB - Particle-In-Cell (PIC) simulations are carried out to investigate the effect of discharge length (L) and pressure (p) on Electron Energy Probability Function (EEPF) in a low pressure radio frequency (rf) inductively coupled plasma (ICP) at 13.56 MHz. It is found that for both cases of varying L (0.1-0.5 m) and p (1-10 mTorr), the EEPF is a bi-Maxwellian with a step in the bounded direction (x) and non-Maxwellian with a hot tail in the symmetric unbounded directions (y, z). The plasma space potential decreases with increase in both L and p, the trapped electrons having energies in the range 0-20 eV. In a conventional discharge bounded in all directions, we infer that L and p are similarity parameters for low energy electrons trapped in the bulk plasma that have energies below the plasma space potential (eVp). The simulation results are consistent with a particle balance model.

KW - Electron energy probability function (EEPF)

KW - Inductively coupled plasma (ICP)

KW - L-p similarity

KW - Maxwellian distribution

KW - Particle balance

KW - Particle-in-cell (PIC) simulations

UR - http://www.scopus.com/inward/record.url?scp=85013371619&partnerID=8YFLogxK

U2 - 10.3389/fphy.2015.00007

DO - 10.3389/fphy.2015.00007

M3 - Article

SN - 2296-424X

VL - 3

JO - Frontiers in Physics

JF - Frontiers in Physics

IS - FEB

M1 - 7

ER -