TY - JOUR
T1 - Electron interaction cross sections for a low-temperature 'plasma-like' gas mixture
AU - Hargreaves, L. R.
AU - Brunton, J. R.
AU - Brunger, M. J.
AU - Buckman, S. J.
PY - 2010/12
Y1 - 2010/12
N2 - Electron interaction cross sections for species found in low-temperature industrial plasma environments are a crucial component to allow for accurate modeling of those plasmas. However, such data are still rarely reported in the literature, due to the complexities of working with such highly reactive species in a laboratory. Here, absolute differential cross section measurements for a 'plasma-like' gas mixture, containing CF3I, CF3, I 2, I and C2F6, are reported.
AB - Electron interaction cross sections for species found in low-temperature industrial plasma environments are a crucial component to allow for accurate modeling of those plasmas. However, such data are still rarely reported in the literature, due to the complexities of working with such highly reactive species in a laboratory. Here, absolute differential cross section measurements for a 'plasma-like' gas mixture, containing CF3I, CF3, I 2, I and C2F6, are reported.
UR - http://www.scopus.com/inward/record.url?scp=78649944566&partnerID=8YFLogxK
U2 - 10.1088/0963-0252/19/6/065021
DO - 10.1088/0963-0252/19/6/065021
M3 - Article
SN - 0963-0252
VL - 19
JO - Plasma Sources Science and Technology
JF - Plasma Sources Science and Technology
IS - 6
M1 - 065021
ER -