Electron transport coefficients in O2 magnetron discharges

R. D. White; R. E. Robson; K. F. Ness; T. Makabe

doi:10.1088/0022-3727/38/7/006

Electron transport coefficients in O₂ magnetron discharges

R. D. White^*, R. E. Robson, K. F. Ness, T. Makabe

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

Electron transport coefficients required for the modelling of bulk electron transport in an O₂ magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.

Original language	English
Pages (from-to)	997-1004
Number of pages	8
Journal	Journal Physics D: Applied Physics
Volume	38
Issue number	7
DOIs	https://doi.org/10.1088/0022-3727/38/7/006
Publication status	Published - 7 Apr 2005

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@article{8278d05439004e63905852c2951f50ea,

title = "Electron transport coefficients in O2 magnetron discharges",

abstract = "Electron transport coefficients required for the modelling of bulk electron transport in an O2 magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.",

author = "White, {R. D.} and Robson, {R. E.} and Ness, {K. F.} and T. Makabe",

year = "2005",

month = apr,

day = "7",

doi = "10.1088/0022-3727/38/7/006",

language = "English",

volume = "38",

pages = "997--1004",

journal = "Journal Physics D: Applied Physics",

issn = "0022-3727",

publisher = "IOP Publishing Ltd.",

number = "7",

}

TY - JOUR

T1 - Electron transport coefficients in O2 magnetron discharges

AU - White, R. D.

AU - Robson, R. E.

AU - Ness, K. F.

AU - Makabe, T.

PY - 2005/4/7

Y1 - 2005/4/7

N2 - Electron transport coefficients required for the modelling of bulk electron transport in an O2 magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.

AB - Electron transport coefficients required for the modelling of bulk electron transport in an O2 magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.

UR - http://www.scopus.com/inward/record.url?scp=17444383486&partnerID=8YFLogxK

U2 - 10.1088/0022-3727/38/7/006

DO - 10.1088/0022-3727/38/7/006

M3 - Article

SN - 0022-3727

VL - 38

SP - 997

EP - 1004

JO - Journal Physics D: Applied Physics

JF - Journal Physics D: Applied Physics

IS - 7

ER -

Electron transport coefficients in O₂ magnetron discharges

Abstract

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