Electron velocity distribution functions in a sputtering magnetron discharge for the ExB direction

T. E. Sheridan; M. J. Goeckner; J. Goree

doi:10.1116/1.581325

Electron velocity distribution functions in a sputtering magnetron discharge for the ExB direction

T. E. Sheridan^*, M. J. Goeckner, J. Goree

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

39 Citations (Scopus)

Abstract

The electron velocity distribution function is measured for the ExB (azimuthal) direction in a cylindrically symmetric, planar, sputtering magnetron discharge as a function of height above the cathode. Near the cathode, the distribution function is approximately a warm Maxwellian (T_e ≈2 eV) shifted in the ExB direction, indicating a strong azimuthal drift. Farther above the cathode, the distribution function is characterized by a cold (T_e≈0.5 eV), Maxwellian bulk with energetic, asymmetric tails.

Original language	English
Pages (from-to)	2173-2176
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	16
Issue number	4
DOIs	https://doi.org/10.1116/1.581325
Publication status	Published - 1998

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title = "Electron velocity distribution functions in a sputtering magnetron discharge for the ExB direction",

abstract = "The electron velocity distribution function is measured for the ExB (azimuthal) direction in a cylindrically symmetric, planar, sputtering magnetron discharge as a function of height above the cathode. Near the cathode, the distribution function is approximately a warm Maxwellian (Te ≈2 eV) shifted in the ExB direction, indicating a strong azimuthal drift. Farther above the cathode, the distribution function is characterized by a cold (Te≈0.5 eV), Maxwellian bulk with energetic, asymmetric tails.",

author = "Sheridan, {T. E.} and Goeckner, {M. J.} and J. Goree",

year = "1998",

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pages = "2173--2176",

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AU - Sheridan, T. E.

AU - Goeckner, M. J.

AU - Goree, J.

PY - 1998

Y1 - 1998

N2 - The electron velocity distribution function is measured for the ExB (azimuthal) direction in a cylindrically symmetric, planar, sputtering magnetron discharge as a function of height above the cathode. Near the cathode, the distribution function is approximately a warm Maxwellian (Te ≈2 eV) shifted in the ExB direction, indicating a strong azimuthal drift. Farther above the cathode, the distribution function is characterized by a cold (Te≈0.5 eV), Maxwellian bulk with energetic, asymmetric tails.

AB - The electron velocity distribution function is measured for the ExB (azimuthal) direction in a cylindrically symmetric, planar, sputtering magnetron discharge as a function of height above the cathode. Near the cathode, the distribution function is approximately a warm Maxwellian (Te ≈2 eV) shifted in the ExB direction, indicating a strong azimuthal drift. Farther above the cathode, the distribution function is characterized by a cold (Te≈0.5 eV), Maxwellian bulk with energetic, asymmetric tails.

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U2 - 10.1116/1.581325

DO - 10.1116/1.581325

M3 - Article

SN - 0734-2101

VL - 16

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EP - 2176

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

ER -

Electron velocity distribution functions in a sputtering magnetron discharge for the ExB direction

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