Energy balance in a low pressure capacitive discharge driven by a double-saddle antenna

C. Charles; R. W. Boswell; M. A. Lieberman

doi:10.1063/1.1555058

Energy balance in a low pressure capacitive discharge driven by a double-saddle antenna

C. Charles^*, R. W. Boswell, M. A. Lieberman

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

The energy balance in a low pressure capacitive discharge driven by a double-saddle antenna was investigated. The palsma parameters were measured by using a retarding field energy analyzers. The results showed that the ion acceleration into the glass along the antenna and fast electrons escaping the plasma accounted for most of the power deposition to the walls.

Original language	English
Pages (from-to)	891-899
Number of pages	9
Journal	Physics of Plasmas
Volume	10
Issue number	3
DOIs	https://doi.org/10.1063/1.1555058
Publication status	Published - Mar 2003

Access to Document

10.1063/1.1555058

Cite this

@article{5e076436b36d49ed97b57a6837034bf2,

title = "Energy balance in a low pressure capacitive discharge driven by a double-saddle antenna",

abstract = "The energy balance in a low pressure capacitive discharge driven by a double-saddle antenna was investigated. The palsma parameters were measured by using a retarding field energy analyzers. The results showed that the ion acceleration into the glass along the antenna and fast electrons escaping the plasma accounted for most of the power deposition to the walls.",

author = "C. Charles and Boswell, {R. W.} and Lieberman, {M. A.}",

year = "2003",

month = mar,

doi = "10.1063/1.1555058",

language = "English",

volume = "10",

pages = "891--899",

journal = "Physics of Plasmas",

issn = "1070-664X",

publisher = "American Institute of Physics",

number = "3",

}

TY - JOUR

T1 - Energy balance in a low pressure capacitive discharge driven by a double-saddle antenna

AU - Charles, C.

AU - Boswell, R. W.

AU - Lieberman, M. A.

PY - 2003/3

Y1 - 2003/3

N2 - The energy balance in a low pressure capacitive discharge driven by a double-saddle antenna was investigated. The palsma parameters were measured by using a retarding field energy analyzers. The results showed that the ion acceleration into the glass along the antenna and fast electrons escaping the plasma accounted for most of the power deposition to the walls.

AB - The energy balance in a low pressure capacitive discharge driven by a double-saddle antenna was investigated. The palsma parameters were measured by using a retarding field energy analyzers. The results showed that the ion acceleration into the glass along the antenna and fast electrons escaping the plasma accounted for most of the power deposition to the walls.

UR - http://www.scopus.com/inward/record.url?scp=0037351473&partnerID=8YFLogxK

U2 - 10.1063/1.1555058

DO - 10.1063/1.1555058

M3 - Article

SN - 1070-664X

VL - 10

SP - 891

EP - 899

JO - Physics of Plasmas

JF - Physics of Plasmas

IS - 3

ER -

Energy balance in a low pressure capacitive discharge driven by a double-saddle antenna

Abstract

Access to Document

Other files and links

Fingerprint

Cite this