Enhanced visible and near-infrared optical absorption in silicon supersaturated with chalcogens

Si H. Pan; Daniel Recht; Supakit Charnvanichborikarn; James S. Williams; Michael J. Aziz

doi:10.1063/1.3567759

Enhanced visible and near-infrared optical absorption in silicon supersaturated with chalcogens

Si H. Pan, Daniel Recht, Supakit Charnvanichborikarn, James S. Williams, Michael J. Aziz

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68 Citations (Scopus)

Abstract

We show that single-crystal silicon supersaturated with sulfur (S), selenium (Se), or tellurium (Te) displays a substantially enhanced absorption coefficient for light with wavelengths of 400 to 1600 nm. Alloys were prepared in silicon on insulator wafers by ion implantation followed by nanosecond pulsed laser melting. Measurements of the absorption coefficient were made by direct transmission through freestanding thin films and by spectroscopic ellipsometry.

Original language	English
Article number	121913
Journal	Applied Physics Letters
Volume	98
Issue number	12
DOIs	https://doi.org/10.1063/1.3567759
Publication status	Published - 21 Mar 2011

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title = "Enhanced visible and near-infrared optical absorption in silicon supersaturated with chalcogens",

abstract = "We show that single-crystal silicon supersaturated with sulfur (S), selenium (Se), or tellurium (Te) displays a substantially enhanced absorption coefficient for light with wavelengths of 400 to 1600 nm. Alloys were prepared in silicon on insulator wafers by ion implantation followed by nanosecond pulsed laser melting. Measurements of the absorption coefficient were made by direct transmission through freestanding thin films and by spectroscopic ellipsometry.",

author = "Pan, \{Si H.\} and Daniel Recht and Supakit Charnvanichborikarn and Williams, \{James S.\} and Aziz, \{Michael J.\}",

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T1 - Enhanced visible and near-infrared optical absorption in silicon supersaturated with chalcogens

AU - Pan, Si H.

AU - Recht, Daniel

AU - Charnvanichborikarn, Supakit

AU - Williams, James S.

AU - Aziz, Michael J.

PY - 2011/3/21

Y1 - 2011/3/21

N2 - We show that single-crystal silicon supersaturated with sulfur (S), selenium (Se), or tellurium (Te) displays a substantially enhanced absorption coefficient for light with wavelengths of 400 to 1600 nm. Alloys were prepared in silicon on insulator wafers by ion implantation followed by nanosecond pulsed laser melting. Measurements of the absorption coefficient were made by direct transmission through freestanding thin films and by spectroscopic ellipsometry.

AB - We show that single-crystal silicon supersaturated with sulfur (S), selenium (Se), or tellurium (Te) displays a substantially enhanced absorption coefficient for light with wavelengths of 400 to 1600 nm. Alloys were prepared in silicon on insulator wafers by ion implantation followed by nanosecond pulsed laser melting. Measurements of the absorption coefficient were made by direct transmission through freestanding thin films and by spectroscopic ellipsometry.

UR - https://www.scopus.com/pages/publications/79953846062

U2 - 10.1063/1.3567759

DO - 10.1063/1.3567759

M3 - Article

SN - 0003-6951

VL - 98

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 12

M1 - 121913

ER -

Enhanced visible and near-infrared optical absorption in silicon supersaturated with chalcogens

Abstract

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