Abstract
We present an overview of the Epilift technique, which allows the fabrication of single-crystal silicon films, suitable for photovoltaic purposes. Epitaxial layers are grown by liquid phase epitaxy on partially masked, single-crystal silicon substrates. The layers are detached from the substrate by selective chemical or electrochemical etching, allowing the substrate to be re-used. Epilayers grown on (100) substrates display highly textured surfaces as well as narrow overgrowth widths of the epitaxial layer over the oxide, making them particularly suitable for photovoltaic devices.
| Original language | English |
|---|---|
| Pages (from-to) | 195-199 |
| Number of pages | 5 |
| Journal | Applied Physics A: Materials Science and Processing |
| Volume | 69 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - Aug 1999 |
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