Evaluating Depth Distributions of Dislocations in Silicon Wafers Using Micro-Photoluminescence Excitation Spectroscopy

Hieu T. Nguyen*, Sieu Pheng Phang, Daniel Macdonald

*Corresponding author for this work

    Research output: Contribution to journalConference articlepeer-review

    3 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Evaluating Depth Distributions of Dislocations in Silicon Wafers Using Micro-Photoluminescence Excitation Spectroscopy'. Together they form a unique fingerprint.

    Material Science

    Chemistry

    Engineering