Exceptional silicon surface passivation by an ONO dielectric stack

Teng Choon Kho*, Kean Fong, Keith McIntosh, Evan Franklin, Nicholas Grant, Matthew Stocks, Sieu Pheng Phang, Yimao Wan, Er Chien Wang, Kaushal Vora, Zin Ngwe, Andrew Blakers

*Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    13 Citations (Scopus)

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