Experimental observation of the strong influence of crystal orientation on Electron Rutherford Backscattering Spectra

Maarten Vos; Koceila Aizel; Aimo Winkelmann

doi:10.1016/j.susc.2010.02.016

Experimental observation of the strong influence of crystal orientation on Electron Rutherford Backscattering Spectra

Maarten Vos^*, Koceila Aizel, Aimo Winkelmann

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

In Electron Rutherford Backscattering Spectroscopy (ERBS) energetic electrons (in our case up to 40 keV) impinge on a target and one measures the energy of elastically scattered electrons. This energy depends on the mass of the scattering atom, due to the recoil effect. This technique thus provides information about the sample composition. For single crystals the interaction of the projectile electron with the crystal potential modifies the angular intensity distribution of the scattered electrons. This leads, for example, to the well-known Kikuchi patterns. Here we investigate if such modified angular distribution has any influence on the intensity ratio of the observed elastic peaks in ERBS. Dramatic effects are found. Implications of these observations for quantitative surface analysis using energetic electrons are discussed.

Original language	English
Pages (from-to)	893-897
Number of pages	5
Journal	Surface Science
Volume	604
Issue number	11-12
DOIs	https://doi.org/10.1016/j.susc.2010.02.016
Publication status	Published - 15 Jun 2010

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10.1016/j.susc.2010.02.016

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title = "Experimental observation of the strong influence of crystal orientation on Electron Rutherford Backscattering Spectra",

abstract = "In Electron Rutherford Backscattering Spectroscopy (ERBS) energetic electrons (in our case up to 40 keV) impinge on a target and one measures the energy of elastically scattered electrons. This energy depends on the mass of the scattering atom, due to the recoil effect. This technique thus provides information about the sample composition. For single crystals the interaction of the projectile electron with the crystal potential modifies the angular intensity distribution of the scattered electrons. This leads, for example, to the well-known Kikuchi patterns. Here we investigate if such modified angular distribution has any influence on the intensity ratio of the observed elastic peaks in ERBS. Dramatic effects are found. Implications of these observations for quantitative surface analysis using energetic electrons are discussed.",

keywords = "Elastic electron scattering, Electron Rutherford Backscattering, Kikuchi pattern",

author = "Maarten Vos and Koceila Aizel and Aimo Winkelmann",

year = "2010",

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doi = "10.1016/j.susc.2010.02.016",

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journal = "Surface Science",

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TY - JOUR

T1 - Experimental observation of the strong influence of crystal orientation on Electron Rutherford Backscattering Spectra

AU - Vos, Maarten

AU - Aizel, Koceila

AU - Winkelmann, Aimo

PY - 2010/6/15

Y1 - 2010/6/15

N2 - In Electron Rutherford Backscattering Spectroscopy (ERBS) energetic electrons (in our case up to 40 keV) impinge on a target and one measures the energy of elastically scattered electrons. This energy depends on the mass of the scattering atom, due to the recoil effect. This technique thus provides information about the sample composition. For single crystals the interaction of the projectile electron with the crystal potential modifies the angular intensity distribution of the scattered electrons. This leads, for example, to the well-known Kikuchi patterns. Here we investigate if such modified angular distribution has any influence on the intensity ratio of the observed elastic peaks in ERBS. Dramatic effects are found. Implications of these observations for quantitative surface analysis using energetic electrons are discussed.

AB - In Electron Rutherford Backscattering Spectroscopy (ERBS) energetic electrons (in our case up to 40 keV) impinge on a target and one measures the energy of elastically scattered electrons. This energy depends on the mass of the scattering atom, due to the recoil effect. This technique thus provides information about the sample composition. For single crystals the interaction of the projectile electron with the crystal potential modifies the angular intensity distribution of the scattered electrons. This leads, for example, to the well-known Kikuchi patterns. Here we investigate if such modified angular distribution has any influence on the intensity ratio of the observed elastic peaks in ERBS. Dramatic effects are found. Implications of these observations for quantitative surface analysis using energetic electrons are discussed.

KW - Elastic electron scattering

KW - Electron Rutherford Backscattering

KW - Kikuchi pattern

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U2 - 10.1016/j.susc.2010.02.016

DO - 10.1016/j.susc.2010.02.016

M3 - Article

SN - 0039-6028

VL - 604

SP - 893

EP - 897

JO - Surface Science

JF - Surface Science

IS - 11-12

ER -

Experimental observation of the strong influence of crystal orientation on Electron Rutherford Backscattering Spectra

Abstract

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