Fabrication and characterization of Ge20Sb15Se 65 chalcogenide glass rib waveguides for telecommunication wavelengths

Jun Li; Xiang Shen; Junqiang Sun; Khu Vu; Duk Yong Choi; Rongping Wang; Barry Luther-Davies; Shixun Dai; Tiefeng Xu; Qiuhua Nie

doi:10.1016/j.tsf.2013.07.078

Fabrication and characterization of Ge₂₀Sb₁₅Se ₆₅ chalcogenide glass rib waveguides for telecommunication wavelengths

Jun Li^*, Xiang Shen, Junqiang Sun, Khu Vu, Duk Yong Choi, Rongping Wang, Barry Luther-Davies, Shixun Dai, Tiefeng Xu, Qiuhua Nie

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

We report on the fabrication and optical properties of Ge ₂₀Sb₁₅Se₆₅ chalcogenide glass rib waveguides on a single photonic chip.Radio-frequency magnetron sputtering method is employed to deposit 1.36-μm-thick films and reactive ion etching with CHF₃ is used to pattern 0.76-μm-deep rib waveguides of 1-4 μm wide with low surface roughness and vertical sidewalls.Using lensed fibers, the insertion losses for rib waveguides of different widths are measured and propagation losses are estimated to be lower than 1 dB/cm.Finite difference method simulations and refractive index/curve fitting are used to observe a moderate normal dispersion of the waveguides at 1550 nm.

Original language	English
Pages (from-to)	462-465
Number of pages	4
Journal	Thin Solid Films
Volume	545
DOIs	https://doi.org/10.1016/j.tsf.2013.07.078
Publication status	Published - 31 Oct 2013

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title = "Fabrication and characterization of Ge20Sb15Se 65 chalcogenide glass rib waveguides for telecommunication wavelengths",

abstract = "We report on the fabrication and optical properties of Ge 20Sb15Se65 chalcogenide glass rib waveguides on a single photonic chip.Radio-frequency magnetron sputtering method is employed to deposit 1.36-μm-thick films and reactive ion etching with CHF3 is used to pattern 0.76-μm-deep rib waveguides of 1-4 μm wide with low surface roughness and vertical sidewalls.Using lensed fibers, the insertion losses for rib waveguides of different widths are measured and propagation losses are estimated to be lower than 1 dB/cm.Finite difference method simulations and refractive index/curve fitting are used to observe a moderate normal dispersion of the waveguides at 1550 nm.",

keywords = "Chalcogenide glasses, Dispersion, Fabrication, Rib waveguides",

author = "Jun Li and Xiang Shen and Junqiang Sun and Khu Vu and Choi, {Duk Yong} and Rongping Wang and Barry Luther-Davies and Shixun Dai and Tiefeng Xu and Qiuhua Nie",

year = "2013",

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doi = "10.1016/j.tsf.2013.07.078",

language = "English",

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TY - JOUR

T1 - Fabrication and characterization of Ge20Sb15Se 65 chalcogenide glass rib waveguides for telecommunication wavelengths

AU - Li, Jun

AU - Shen, Xiang

AU - Sun, Junqiang

AU - Vu, Khu

AU - Choi, Duk Yong

AU - Wang, Rongping

AU - Luther-Davies, Barry

AU - Dai, Shixun

AU - Xu, Tiefeng

AU - Nie, Qiuhua

PY - 2013/10/31

Y1 - 2013/10/31

N2 - We report on the fabrication and optical properties of Ge 20Sb15Se65 chalcogenide glass rib waveguides on a single photonic chip.Radio-frequency magnetron sputtering method is employed to deposit 1.36-μm-thick films and reactive ion etching with CHF3 is used to pattern 0.76-μm-deep rib waveguides of 1-4 μm wide with low surface roughness and vertical sidewalls.Using lensed fibers, the insertion losses for rib waveguides of different widths are measured and propagation losses are estimated to be lower than 1 dB/cm.Finite difference method simulations and refractive index/curve fitting are used to observe a moderate normal dispersion of the waveguides at 1550 nm.

AB - We report on the fabrication and optical properties of Ge 20Sb15Se65 chalcogenide glass rib waveguides on a single photonic chip.Radio-frequency magnetron sputtering method is employed to deposit 1.36-μm-thick films and reactive ion etching with CHF3 is used to pattern 0.76-μm-deep rib waveguides of 1-4 μm wide with low surface roughness and vertical sidewalls.Using lensed fibers, the insertion losses for rib waveguides of different widths are measured and propagation losses are estimated to be lower than 1 dB/cm.Finite difference method simulations and refractive index/curve fitting are used to observe a moderate normal dispersion of the waveguides at 1550 nm.

KW - Chalcogenide glasses

KW - Dispersion

KW - Fabrication

KW - Rib waveguides

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U2 - 10.1016/j.tsf.2013.07.078

DO - 10.1016/j.tsf.2013.07.078

M3 - Article

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VL - 545

SP - 462

EP - 465

JO - Thin Solid Films

JF - Thin Solid Films

ER -

Fabrication and characterization of Ge₂₀Sb₁₅Se ₆₅ chalcogenide glass rib waveguides for telecommunication wavelengths

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