Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching

Yinlan Ruan; Weitang Li; Ruth Jarvis; Nathan Madsen; Andrei Rode; Barry Luther-Davies

doi:10.1364/OPEX.12.005140

Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching

Yinlan Ruan^*, Weitang Li, Ruth Jarvis, Nathan Madsen, Andrei Rode, Barry Luther-Davies

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

194 Citations (Scopus)

Abstract

We report the fabrication and characterization of rib chalcogenide waveguides produced by dry etching with CF₄ and O₂. The high index contrast waveguides (Δn ∼ 1) show a minimum propagation loss of 0.25 dB/cm. The high refractive nonlinearity of ∼ 100 times silica in As₂S₃ allowed observation of a π phase shift due to self-phase modulation of an 8 ps duration 1573 nm pulse in a 5 cm long waveguide.

Original language	English
Pages (from-to)	5140-5145
Number of pages	6
Journal	Optics Express
Volume	12
Issue number	21
DOIs	https://doi.org/10.1364/OPEX.12.005140
Publication status	Published - Oct 2004

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abstract = "We report the fabrication and characterization of rib chalcogenide waveguides produced by dry etching with CF4 and O2. The high index contrast waveguides (Δn ∼ 1) show a minimum propagation loss of 0.25 dB/cm. The high refractive nonlinearity of ∼ 100 times silica in As2S3 allowed observation of a π phase shift due to self-phase modulation of an 8 ps duration 1573 nm pulse in a 5 cm long waveguide.",

author = "Yinlan Ruan and Weitang Li and Ruth Jarvis and Nathan Madsen and Andrei Rode and Barry Luther-Davies",

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AU - Madsen, Nathan

AU - Rode, Andrei

AU - Luther-Davies, Barry

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AB - We report the fabrication and characterization of rib chalcogenide waveguides produced by dry etching with CF4 and O2. The high index contrast waveguides (Δn ∼ 1) show a minimum propagation loss of 0.25 dB/cm. The high refractive nonlinearity of ∼ 100 times silica in As2S3 allowed observation of a π phase shift due to self-phase modulation of an 8 ps duration 1573 nm pulse in a 5 cm long waveguide.

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Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching

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