TY - JOUR
T1 - Fabrication of free-standing lithium niobate nanowaveguides down to 50 nm in width
AU - Geiss, Reinhard
AU - Sergeyev, Anton
AU - Hartung, Holger
AU - Solntsev, Alexander S.
AU - Sukhorukov, Andrey A.
AU - Grange, Rachel
AU - Schrempel, Frank
AU - Kley, Ernst Bernhard
AU - Tü Nnermann, Andreas
AU - Pertsch, Thomas
N1 - Publisher Copyright:
© 2016 IOP Publishing Ltd.
PY - 2016/1/18
Y1 - 2016/1/18
N2 - Nonlinear optical nanoscale waveguides are a compact and powerful platform for efficient wavelength conversion. The free-standing waveguide geometry opens a range of applications in microscopy for local delivery of light, where in situ wavelength conversion helps to overcome various wavelength-dependent issues, such as biological tissue damage. In this paper, we present an original patterning method for high-precision fabrication of free-standing nanoscale waveguides based on lithium niobate, a material with a strong second-order nonlinearity and a broad transparency window covering the visible and mid-infrared wavelength ranges. The fabrication process combines electron-beam lithography with ion-beam enhanced etching and produces nanowaveguides with lengths from 5 to 50 μm, widths from 50 to 1000 nm and heights from 50 to 500 nm, each with a precision of few nanometers. The fabricated nanowaveguides are tested in an optical characterization experiment showing efficient second-harmonic generation.
AB - Nonlinear optical nanoscale waveguides are a compact and powerful platform for efficient wavelength conversion. The free-standing waveguide geometry opens a range of applications in microscopy for local delivery of light, where in situ wavelength conversion helps to overcome various wavelength-dependent issues, such as biological tissue damage. In this paper, we present an original patterning method for high-precision fabrication of free-standing nanoscale waveguides based on lithium niobate, a material with a strong second-order nonlinearity and a broad transparency window covering the visible and mid-infrared wavelength ranges. The fabrication process combines electron-beam lithography with ion-beam enhanced etching and produces nanowaveguides with lengths from 5 to 50 μm, widths from 50 to 1000 nm and heights from 50 to 500 nm, each with a precision of few nanometers. The fabricated nanowaveguides are tested in an optical characterization experiment showing efficient second-harmonic generation.
KW - electron-beam lithography
KW - ion-beam enhanced etching
KW - lithium niobate
KW - nanoscale waveguide
KW - second-harmonic generation
UR - http://www.scopus.com/inward/record.url?scp=84954422629&partnerID=8YFLogxK
U2 - 10.1088/0957-4484/27/6/065301
DO - 10.1088/0957-4484/27/6/065301
M3 - Article
SN - 0957-4484
VL - 27
JO - Nanotechnology
JF - Nanotechnology
IS - 6
M1 - 065301
ER -