Fabrication of graphene nanomesh by using an anodic aluminum oxide membrane as a template

Zhiyuan Zeng; Xiao Huang; Zongyou Yin; Hong Li; Yang Chen; Hai Li; Qing Zhang; Jan Ma; Freddy Boey; Hua Zhang

doi:10.1002/adma.201104281

Fabrication of graphene nanomesh by using an anodic aluminum oxide membrane as a template

Zhiyuan Zeng, Xiao Huang, Zongyou Yin, Hong Li, Yang Chen, Hai Li, Qing Zhang, Jan Ma, Freddy Boey, Hua Zhang^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

194 Citations (Scopus)

Abstract

Large-area graphene nanomesh (GNM) is prepared using a new and effective method, in which the O₂ plasma treatment is used with an anodic aluminum oxide (AAO) membrane as an etch mask. By varying the pore size and cell wall thickness of the AAO membrane, GNM with tunable pore size and neck width can be prepared. As proof of concept, a field-effect transistor with 15 nm neck width GNM as the conductive channel is fabricated, which exhibits p-type semiconducting behavior.

Original language	English
Pages (from-to)	4138-4142
Number of pages	5
Journal	Advanced Materials
Volume	24
Issue number	30
DOIs	https://doi.org/10.1002/adma.201104281
Publication status	Published - 8 Aug 2012
Externally published	Yes

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@article{8e22ce9a1e2f484490e4307ec690d640,

title = "Fabrication of graphene nanomesh by using an anodic aluminum oxide membrane as a template",

abstract = "Large-area graphene nanomesh (GNM) is prepared using a new and effective method, in which the O2 plasma treatment is used with an anodic aluminum oxide (AAO) membrane as an etch mask. By varying the pore size and cell wall thickness of the AAO membrane, GNM with tunable pore size and neck width can be prepared. As proof of concept, a field-effect transistor with 15 nm neck width GNM as the conductive channel is fabricated, which exhibits p-type semiconducting behavior.",

keywords = "anodic aluminum oxide (AAO), field-effect transistors, graphene, nanofabrication, nanomesh",

author = "Zhiyuan Zeng and Xiao Huang and Zongyou Yin and Hong Li and Yang Chen and Hai Li and Qing Zhang and Jan Ma and Freddy Boey and Hua Zhang",

year = "2012",

month = aug,

day = "8",

doi = "10.1002/adma.201104281",

language = "English",

volume = "24",

pages = "4138--4142",

journal = "Advanced Materials",

issn = "0935-9648",

publisher = "Wiley-Blackwell",

number = "30",

}

TY - JOUR

T1 - Fabrication of graphene nanomesh by using an anodic aluminum oxide membrane as a template

AU - Zeng, Zhiyuan

AU - Huang, Xiao

AU - Yin, Zongyou

AU - Li, Hong

AU - Chen, Yang

AU - Li, Hai

AU - Zhang, Qing

AU - Ma, Jan

AU - Boey, Freddy

AU - Zhang, Hua

PY - 2012/8/8

Y1 - 2012/8/8

N2 - Large-area graphene nanomesh (GNM) is prepared using a new and effective method, in which the O2 plasma treatment is used with an anodic aluminum oxide (AAO) membrane as an etch mask. By varying the pore size and cell wall thickness of the AAO membrane, GNM with tunable pore size and neck width can be prepared. As proof of concept, a field-effect transistor with 15 nm neck width GNM as the conductive channel is fabricated, which exhibits p-type semiconducting behavior.

AB - Large-area graphene nanomesh (GNM) is prepared using a new and effective method, in which the O2 plasma treatment is used with an anodic aluminum oxide (AAO) membrane as an etch mask. By varying the pore size and cell wall thickness of the AAO membrane, GNM with tunable pore size and neck width can be prepared. As proof of concept, a field-effect transistor with 15 nm neck width GNM as the conductive channel is fabricated, which exhibits p-type semiconducting behavior.

KW - anodic aluminum oxide (AAO)

KW - field-effect transistors

KW - graphene

KW - nanofabrication

KW - nanomesh

UR - http://www.scopus.com/inward/record.url?scp=84864625810&partnerID=8YFLogxK

U2 - 10.1002/adma.201104281

DO - 10.1002/adma.201104281

M3 - Article

SN - 0935-9648

VL - 24

SP - 4138

EP - 4142

JO - Advanced Materials

JF - Advanced Materials

IS - 30

ER -

Fabrication of graphene nanomesh by using an anodic aluminum oxide membrane as a template

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