Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography

Yinlan Ruan; Myung Ki Kim; Yong He Lee; Barry Luther-Davies; Andrei Rode

doi:10.1063/1.2476416

Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography

Yinlan Ruan^*, Myung Ki Kim, Yong He Lee, Barry Luther-Davies, Andrei Rode

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

40 Citations (Scopus)

Abstract

The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.

Original language	English
Article number	071102
Journal	Applied Physics Letters
Volume	90
Issue number	7
DOIs	https://doi.org/10.1063/1.2476416
Publication status	Published - 2007

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abstract = "The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.",

author = "Yinlan Ruan and Kim, {Myung Ki} and Lee, {Yong He} and Barry Luther-Davies and Andrei Rode",

year = "2007",

doi = "10.1063/1.2476416",

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volume = "90",

journal = "Applied Physics Letters",

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T1 - Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography

AU - Ruan, Yinlan

AU - Kim, Myung Ki

AU - Lee, Yong He

AU - Luther-Davies, Barry

AU - Rode, Andrei

PY - 2007

Y1 - 2007

N2 - The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.

AB - The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.

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U2 - 10.1063/1.2476416

DO - 10.1063/1.2476416

M3 - Article

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VL - 90

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 7

M1 - 071102

ER -

Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography

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