Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography

T. Han; S. Madden; Douglas Bulla; Barry Luther-Davies

doi:10.1109/COMMAD.2010.5699775

Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography

T. Han^*, S. Madden, Douglas Bulla, Barry Luther-Davies

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We report the fabrication of Chalcogenide glass rib waveguides by thermal nano-imprint. Waveguides 2-4μm wide and 1μm high were fabricated with optical losses of 0.26dB/cm and 0.27dB/cm for TM and TE polarizations at 1550nm.

Original language	English
Title of host publication	2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings
Pages	53-54
Number of pages	2
DOIs	https://doi.org/10.1109/COMMAD.2010.5699775
Publication status	Published - 2010
Event	2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 - Canberra, ACT, Australia Duration: 12 Dec 2010 → 15 Dec 2010

Publication series

Name	Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD

Conference

Conference	2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010
Country/Territory	Australia
City	Canberra, ACT
Period	12/12/10 → 15/12/10

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10.1109/COMMAD.2010.5699775

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Han, T., Madden, S., Bulla, D., & Luther-Davies, B. (2010). Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography. In 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings (pp. 53-54). Article 5699775 (Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD). https://doi.org/10.1109/COMMAD.2010.5699775

@inproceedings{e6b49ba3282646e0b9fb7b0f7d3d8ab7,

title = "Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography",

abstract = "We report the fabrication of Chalcogenide glass rib waveguides by thermal nano-imprint. Waveguides 2-4μm wide and 1μm high were fabricated with optical losses of 0.26dB/cm and 0.27dB/cm for TM and TE polarizations at 1550nm.",

author = "T. Han and S. Madden and Douglas Bulla and Barry Luther-Davies",

year = "2010",

doi = "10.1109/COMMAD.2010.5699775",

language = "English",

isbn = "9781424473328",

series = "Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD",

pages = "53--54",

booktitle = "2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings",

note = "2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 ; Conference date: 12-12-2010 Through 15-12-2010",

}

Han, T, Madden, S, Bulla, D & Luther-Davies, B 2010, Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography. in 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings., 5699775, Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD, pp. 53-54, 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010, Canberra, ACT, Australia, 12/12/10. https://doi.org/10.1109/COMMAD.2010.5699775

Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography. / Han, T.; Madden, S.; Bulla, Douglas et al.
2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings. 2010. p. 53-54 5699775 (Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography

AU - Han, T.

AU - Madden, S.

AU - Bulla, Douglas

AU - Luther-Davies, Barry

PY - 2010

Y1 - 2010

N2 - We report the fabrication of Chalcogenide glass rib waveguides by thermal nano-imprint. Waveguides 2-4μm wide and 1μm high were fabricated with optical losses of 0.26dB/cm and 0.27dB/cm for TM and TE polarizations at 1550nm.

AB - We report the fabrication of Chalcogenide glass rib waveguides by thermal nano-imprint. Waveguides 2-4μm wide and 1μm high were fabricated with optical losses of 0.26dB/cm and 0.27dB/cm for TM and TE polarizations at 1550nm.

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U2 - 10.1109/COMMAD.2010.5699775

DO - 10.1109/COMMAD.2010.5699775

M3 - Conference contribution

SN - 9781424473328

T3 - Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD

SP - 53

EP - 54

BT - 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings

T2 - 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010

Y2 - 12 December 2010 through 15 December 2010

ER -

Han T, Madden S, Bulla D, Luther-Davies B. Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography. In 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings. 2010. p. 53-54. 5699775. (Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD). doi: 10.1109/COMMAD.2010.5699775

Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography

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