Fabrication of low loss Ge33 As12 Se55 (AMTIR-1) planar waveguides

Duk Yong Choi; Steve Madden; Andrei Rode; Rongping Wang; Barry Luther-Davies

doi:10.1063/1.2754360

Fabrication of low loss Ge33 As12 Se55 (AMTIR-1) planar waveguides

Duk Yong Choi^*, Steve Madden, Andrei Rode, Rongping Wang, Barry Luther-Davies

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

46 Citations (Scopus)

Abstract

The authors describe the fabrication of low loss Ge33 As12 Se55 rib waveguides. Pulsed laser deposition was used to obtain high quality, dense films with the same stoichiometry as the bulk glass, while standard semiconductor processing was used to pattern the waveguides. They obtained rib waveguides of 3, 4, and 5 μm wide with propagation losses (0.3 dBcm at 1550 nm) more than ten times lower than previously reported for this material.

Original language	English
Article number	011115
Journal	Applied Physics Letters
Volume	91
Issue number	1
DOIs	https://doi.org/10.1063/1.2754360
Publication status	Published - 2007

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abstract = "The authors describe the fabrication of low loss Ge33 As12 Se55 rib waveguides. Pulsed laser deposition was used to obtain high quality, dense films with the same stoichiometry as the bulk glass, while standard semiconductor processing was used to pattern the waveguides. They obtained rib waveguides of 3, 4, and 5 μm wide with propagation losses (0.3 dBcm at 1550 nm) more than ten times lower than previously reported for this material.",

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AU - Luther-Davies, Barry

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Fabrication of low loss Ge33 As12 Se55 (AMTIR-1) planar waveguides

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