Fabrication of submicron structures by three-dimensional laser lithography

I. I. Shishkin, M. V. Rybin*, K. B. Samusev, M. F. Limonov, R. V. Kiyan, B. N. Chichkov, Yu S. Kivshar, P. A. Belov

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    9 Citations (Scopus)


    As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.

    Original languageEnglish
    Pages (from-to)531-534
    Number of pages4
    JournalJETP Letters
    Issue number9
    Publication statusPublished - 2014


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