Fabrication tolerant planar directional couplers

C. K. Lai*, Y. L. Zhong, T. Han, W. Y. Chong, D. Y. Choi, H. D.K. Goldsmith, P. Ma, H. Ahmad, S. Madden

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Hybrid integration of different materials will allow for different functionalities such as passive, amplifying, nonlinear, electro-optic, detection etc to build "system on a chip" devices. The vertically stacked layer design commonly proposed significantly increases the difficulty of the lithography process for the bottom-most layer due to the overlying topology. A methodology for significantly improving the fabrication tolerance of planar directional couplers is therefore presented. A parametric design study reveals that significant dimensional sensitivity improvements exist for certain center-To-center spacings for both power and wavelength splitters.

Original languageEnglish
Title of host publicationAOS Australian Conference on Optical Fibre Technology, ACOFT 2019 and Australian Conference on Optics, Lasers, and Spectroscopy, ACOLS 2019
EditorsArnan Mitchell, Halina Rubinsztein-Dunlop
PublisherSPIE
ISBN (Electronic)9781510631403
DOIs
Publication statusPublished - 2019
EventAOS Australian Conference on Optical Fibre Technology, ACOFT 2019 and Australian Conference on Optics, Lasers, and Spectroscopy, ACOLS 2019 - Melbourne, Australia
Duration: 9 Dec 201912 Dec 2019

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11200
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceAOS Australian Conference on Optical Fibre Technology, ACOFT 2019 and Australian Conference on Optics, Lasers, and Spectroscopy, ACOLS 2019
Country/TerritoryAustralia
CityMelbourne
Period9/12/1912/12/19

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