Abstract
A significant reduction in contact resistance of palladium/silicon contacts was realised by the use of a thin intermediate gallium layer. The contact resistance of the palladium/gallium/silicon contact was found to be similar to aluminium/silicon contacts on 0·5 Ω cm silicon. Solar cells processed on 1 Ω cm substrates with this structure demonstrated better contact properties than conventional aluminium/silicon contacts. The improved characteristics are believed to be a result of gallium/silicon alloying at low temperature (400°C). The palladium layer is critical as aluminium/gallium/silicon layers show dramatically increased contact resistance. The palladium silicide may interact with the aluminium layer to form a stable ternary compound, preventing aluminium from penetrating deeper into the silicon.
Original language | English |
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Pages (from-to) | 409-416 |
Number of pages | 8 |
Journal | Progress in Photovoltaics: Research and Applications |
Volume | 9 |
Issue number | 6 |
DOIs | |
Publication status | Published - Nov 2001 |