Fingerprint
Dive into the research topics of 'Gettering Effects of Silicon Nitride Films from Various Plasma-Enhanced Chemical Vapor Deposition Conditions'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Gettering Effects of Silicon Nitride Films from Various Plasma-Enhanced Chemical Vapor Deposition Conditions
Anyao Liu*, Ziv Hameiri, Yimao Wan, Chang Sun, Daniel Macdonald
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
10
Citations
(Scopus)