Graded silicon nitride films: Optics and passivation

Andrew Thomson; Yimao Wan; Niraj Lal; Robert G. Elliman

doi:10.1116/1.4935101

Graded silicon nitride films: Optics and passivation

Andrew Thomson^*, Yimao Wan, Niraj Lal, Robert G. Elliman

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

The authors describe a method for graded thin-film deposition requiring a single step that exploits the noninstantaneous replacement of reactant gases. They deposit the graded silicon-nitride films by plasma enhanced chemical vapor deposition. Channeling Rutherford backscattering measurements of the graded films find the N:Si ratio increases sixfold from the c-Si surface to air interfaces. The refractive index at the crystalline silicon/film interface was 2.96 reducing monotonically to 1.95 at the surface. The graded films achieve improved optics and surface passivation for silicon solar cells with measured surface recombination velocity of 3.9 cm/s.

Original language	English
Article number	060610
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	33
Issue number	6
DOIs	https://doi.org/10.1116/1.4935101
Publication status	Published - 1 Nov 2015

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title = "Graded silicon nitride films: Optics and passivation",

abstract = "The authors describe a method for graded thin-film deposition requiring a single step that exploits the noninstantaneous replacement of reactant gases. They deposit the graded silicon-nitride films by plasma enhanced chemical vapor deposition. Channeling Rutherford backscattering measurements of the graded films find the N:Si ratio increases sixfold from the c-Si surface to air interfaces. The refractive index at the crystalline silicon/film interface was 2.96 reducing monotonically to 1.95 at the surface. The graded films achieve improved optics and surface passivation for silicon solar cells with measured surface recombination velocity of 3.9 cm/s.",

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AU - Wan, Yimao

AU - Lal, Niraj

AU - Elliman, Robert G.

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Graded silicon nitride films: Optics and passivation

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