Abstract
A two-dimensional mapping of ion density and plasma potential in a diverging magnetized low pressure (0.4 mTorr) carbon dioxide helicon plasma containing a double layer reveals the presence of high density conics (∼7× 109 cm-3) along the most diverging magnetic field lines exiting the helicon source and connecting with the grounded expansion chamber. The density in the conic is about 30% greater than the density at the double layer and this results from local ionization associated with the presence of a high energy tail in the electron energy probability function. The plasma potential along the conic is constant at about 30 V.
Original language | English |
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Article number | 051502 |
Journal | Applied Physics Letters |
Volume | 96 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2010 |