High-Luminescence and Submillimeter-Scale MoS2 Monolayer Growth Using Combinational Phase Precursors via Chemical Vapor Deposition

Ary Wibowo, Mike Tebyetekerwa, Anh Bui, Felipe Kremer, Sandra Saji, Zongyou Yin, Yuerui Lu, Daniel MacDonald, Hieu Nguyen

    Research output: Contribution to journalArticlepeer-review

    Abstract

    We successfully synthesize high-luminescence and submillimeter-scale monolayers of molybdenum disulfide (MoS2) employing a combinational phase precursor via a chemical vapor deposition (CVD) approach. First, sodium nitrate catalyst is demonstrated to assist the reaction equilibrium of a solid precursor CVD process, leading to an increased density and size of MoS2 monolayer flakes (∼120 μm). However, the monolayers’ photoluminescence intensity is significantly reduced due to the presence of excess residues. A suspension solution-based precursor is also tested using the optimized temperature, pressure, and catalyst from the solid precursor case, and it is found to also give a high density of uniform triangles with an average size of ∼80 μm. Finally, combining both precursor phases (combinational phase precursor) yields the largest monolayer flakes with an average size of ∼200 μm and the highest luminescence, with photoluminescence intensities being 1 order of magnitude higher than that of a standard mechanical exfoliated monolayer.
    Original languageEnglish
    Pages (from-to)5072–5080
    JournalACS Applied Electronic Materials
    Volume4
    Issue number10
    DOIs
    Publication statusPublished - 2022

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