High performance control of a PZT scanner for fast nanoscale positioning of atomic force microscope

M. S. Rana, H. R. Pota, I. R. Petersen, Habibullah

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

14 Citations (Scopus)

Abstract

This paper demonstrates the design and experimental implementation of an observer based model predictive control (OMPC) with a notch filter for the positioning of the piezoelectric tube (PZT) scanner of an atomic force microscope (AFM). This control scheme achieves active damping of the resonant mode of the PZT scanner and accurate tracking of a reference triangular signal. Kalman filter is used to obtain full-state information in the presence of position sensor noise. The experimental results confirm the efficacy of the proposed controller.

Original languageEnglish
Title of host publication2012 2nd Australian Control Conference, AUCC 2012
PublisherIEEE Computer Society
Pages464-469
Number of pages6
ISBN (Print)9781922107633
Publication statusPublished - 2012
Externally publishedYes
Event2nd Australian Control Conference, AUCC 2012 - Sydney, NSW, Australia
Duration: 15 Nov 201216 Nov 2012

Publication series

Name2012 2nd Australian Control Conference, AUCC 2012

Conference

Conference2nd Australian Control Conference, AUCC 2012
Country/TerritoryAustralia
CitySydney, NSW
Period15/11/1216/11/12

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