High source potential upstream of a current-free electric double layer

C. Charles*

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    25 Citations (Scopus)

    Abstract

    Large plasma potentials (up to ~80 V) are measured upstream of a current-free electric double layer generated in a helicon rf argon discharge for a constant rf power of 250 W (at 13.56 MHz) and for low operating pressures (<2 mTorr) using an electrostatic ion energy analyzer. The energy of the Ar+ ion beam formed by acceleration through the potential drop of the double layer is found to be strongly correlated with the large source potentials: both the source potential and the beam energy increase with decreasing pressure. The creation of the double layer depends on the magnetic field generated by the solenoid near the closed end (glass plate) of the helicon source.

    Original languageEnglish
    Pages (from-to)1-4
    Number of pages4
    JournalPhysics of Plasmas
    Volume12
    Issue number4
    DOIs
    Publication statusPublished - Apr 2005

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