Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

Ting Yang Yan; Xiang Shen; Rong Ping Wang; Guo Xiang Wang; Shi Xun Dai; Tie Feng Xu; Qiu Hua Nie

doi:10.1088/1674-1056/26/2/024213

Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

Ting Yang Yan, Xiang Shen^*, Rong Ping Wang, Guo Xiang Wang, Shi Xun Dai, Tie Feng Xu, Qiu Hua Nie

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

Chalcogenide glasses have shown promise in fabricating mid infrared (MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low, making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions.

Original language	English
Article number	024213
Journal	Chinese Physics B
Volume	26
Issue number	2
DOIs	https://doi.org/10.1088/1674-1056/26/2/024213
Publication status	Published - Feb 2017

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title = "Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing",

abstract = "Chalcogenide glasses have shown promise in fabricating mid infrared (MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low, making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions.",

keywords = "MIR sensing, chalcogenide glasses, hot embossing, rib waveguides",

author = "Yan, {Ting Yang} and Xiang Shen and Wang, {Rong Ping} and Wang, {Guo Xiang} and Dai, {Shi Xun} and Xu, {Tie Feng} and Nie, {Qiu Hua}",

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AU - Yan, Ting Yang

AU - Shen, Xiang

AU - Wang, Rong Ping

AU - Wang, Guo Xiang

AU - Dai, Shi Xun

AU - Xu, Tie Feng

AU - Nie, Qiu Hua

PY - 2017/2

Y1 - 2017/2

N2 - Chalcogenide glasses have shown promise in fabricating mid infrared (MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low, making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions.

AB - Chalcogenide glasses have shown promise in fabricating mid infrared (MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low, making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions.

KW - MIR sensing

KW - chalcogenide glasses

KW - hot embossing

KW - rib waveguides

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VL - 26

JO - Chinese Physics B

JF - Chinese Physics B

IS - 2

M1 - 024213

ER -

Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

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