Hybrid high-resolution three-dimensional nanofabrication for metamaterials and nanoplasmonics

Isabelle Staude; Manuel Decker; Michael J. Ventura; Chennupati Jagadish; Dragomir N. Neshev; Min Gu; Yuri S. Kivshar

doi:10.1002/adma.201203564

Hybrid high-resolution three-dimensional nanofabrication for metamaterials and nanoplasmonics

Isabelle Staude^*, Manuel Decker, Michael J. Ventura, Chennupati Jagadish, Dragomir N. Neshev, Min Gu, Yuri S. Kivshar

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

47 Citations (Scopus)

Abstract

We propose a novel hybrid fabrication approach that combines direct laser writing with a subsequent electron-beam lithography step. This approach allows realizing out-of-plane plasmonic nanostructures with truly nanoscopic feature sizes. The excellent quality of the obtained structures is evidenced by optical characterization of upright-standing split-ring resonator arrays fabricated along these lines.

Original language	English
Pages (from-to)	1260-1264
Number of pages	5
Journal	Advanced Materials
Volume	25
Issue number	9
DOIs	https://doi.org/10.1002/adma.201203564
Publication status	Published - 6 Mar 2013

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abstract = "We propose a novel hybrid fabrication approach that combines direct laser writing with a subsequent electron-beam lithography step. This approach allows realizing out-of-plane plasmonic nanostructures with truly nanoscopic feature sizes. The excellent quality of the obtained structures is evidenced by optical characterization of upright-standing split-ring resonator arrays fabricated along these lines.",

keywords = "direct laser writing, metamaterials, nanoantennas, nanoplasmonics, three-dimensional nanofabrication",

author = "Isabelle Staude and Manuel Decker and Ventura, \{Michael J.\} and Chennupati Jagadish and Neshev, \{Dragomir N.\} and Min Gu and Kivshar, \{Yuri S.\}",

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AU - Staude, Isabelle

AU - Decker, Manuel

AU - Ventura, Michael J.

AU - Jagadish, Chennupati

AU - Neshev, Dragomir N.

AU - Gu, Min

AU - Kivshar, Yuri S.

PY - 2013/3/6

Y1 - 2013/3/6

N2 - We propose a novel hybrid fabrication approach that combines direct laser writing with a subsequent electron-beam lithography step. This approach allows realizing out-of-plane plasmonic nanostructures with truly nanoscopic feature sizes. The excellent quality of the obtained structures is evidenced by optical characterization of upright-standing split-ring resonator arrays fabricated along these lines.

AB - We propose a novel hybrid fabrication approach that combines direct laser writing with a subsequent electron-beam lithography step. This approach allows realizing out-of-plane plasmonic nanostructures with truly nanoscopic feature sizes. The excellent quality of the obtained structures is evidenced by optical characterization of upright-standing split-ring resonator arrays fabricated along these lines.

KW - direct laser writing

KW - metamaterials

KW - nanoantennas

KW - nanoplasmonics

KW - three-dimensional nanofabrication

UR - https://www.scopus.com/pages/publications/84874896653

U2 - 10.1002/adma.201203564

DO - 10.1002/adma.201203564

M3 - Article

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SP - 1260

EP - 1264

JO - Advanced Materials

JF - Advanced Materials

IS - 9

ER -

Hybrid high-resolution three-dimensional nanofabrication for metamaterials and nanoplasmonics

Abstract

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