Hydrogen platelet evolution in mechanically strained silicon

D. J. Pyke; R. G. Elliman; J. C. McCallum

doi:10.1109/COMMAD.2010.5699728

Hydrogen platelet evolution in mechanically strained silicon

D. J. Pyke, R. G. Elliman, J. C. McCallum

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The effect of intrinsic and applied stress on hydrogen diffusion and trapping are studied by elastic-recoil detection (ERD), Rutherford backscattering and channelling (RBS-C) and transmission electron microscopy (TEM).

Original language	English
Title of host publication	2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings
Pages	181-182
Number of pages	2
DOIs	https://doi.org/10.1109/COMMAD.2010.5699728
Publication status	Published - 2010
Event	2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 - Canberra, ACT, Australia Duration: 12 Dec 2010 → 15 Dec 2010

Publication series

Name	Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD

Conference

Conference	2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010
Country/Territory	Australia
City	Canberra, ACT
Period	12/12/10 → 15/12/10

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10.1109/COMMAD.2010.5699728

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Pyke, D. J., Elliman, R. G., & McCallum, J. C. (2010). Hydrogen platelet evolution in mechanically strained silicon. In 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings (pp. 181-182). Article 5699728 (Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD). https://doi.org/10.1109/COMMAD.2010.5699728

@inproceedings{7c140ddfe68547c4af2035e93d40ee11,

title = "Hydrogen platelet evolution in mechanically strained silicon",

abstract = "The effect of intrinsic and applied stress on hydrogen diffusion and trapping are studied by elastic-recoil detection (ERD), Rutherford backscattering and channelling (RBS-C) and transmission electron microscopy (TEM).",

author = "Pyke, {D. J.} and Elliman, {R. G.} and McCallum, {J. C.}",

year = "2010",

doi = "10.1109/COMMAD.2010.5699728",

language = "English",

isbn = "9781424473328",

series = "Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD",

pages = "181--182",

booktitle = "2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings",

note = "2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 ; Conference date: 12-12-2010 Through 15-12-2010",

}

Pyke, DJ, Elliman, RG & McCallum, JC 2010, Hydrogen platelet evolution in mechanically strained silicon. in 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings., 5699728, Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD, pp. 181-182, 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010, Canberra, ACT, Australia, 12/12/10. https://doi.org/10.1109/COMMAD.2010.5699728

Hydrogen platelet evolution in mechanically strained silicon. / Pyke, D. J.; Elliman, R. G.; McCallum, J. C.
2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings. 2010. p. 181-182 5699728 (Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Hydrogen platelet evolution in mechanically strained silicon

AU - Pyke, D. J.

AU - Elliman, R. G.

AU - McCallum, J. C.

PY - 2010

Y1 - 2010

N2 - The effect of intrinsic and applied stress on hydrogen diffusion and trapping are studied by elastic-recoil detection (ERD), Rutherford backscattering and channelling (RBS-C) and transmission electron microscopy (TEM).

AB - The effect of intrinsic and applied stress on hydrogen diffusion and trapping are studied by elastic-recoil detection (ERD), Rutherford backscattering and channelling (RBS-C) and transmission electron microscopy (TEM).

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U2 - 10.1109/COMMAD.2010.5699728

DO - 10.1109/COMMAD.2010.5699728

M3 - Conference contribution

SN - 9781424473328

T3 - Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD

SP - 181

EP - 182

BT - 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010 Proceedings

T2 - 2010 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2010

Y2 - 12 December 2010 through 15 December 2010

ER -

Hydrogen platelet evolution in mechanically strained silicon

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