Impact of Depth-Wise Inhomogeneous Iron Distributions on the Accuracy of Lifetime-Based Interstitial Iron Measurements on Silicon Wafers

Tien T. Le*, Sieu Pheng Phang, Zhongshu Yang, Daniel Macdonald, Anyao Liu

*Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    4 Citations (Scopus)

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