Implantation-Produced Structural Damage in InxGa1-xN

Implantation-Produced Structural Damage in In_xGa_1-xN

Sergei Kucheyev, Jim Williams, J. Zou, S J Pearton, Y Nakagawa

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

@article{5c6ccacf97424450bad7ce8fb3f65721,

title = "Implantation-Produced Structural Damage in InxGa1-xN",

author = "Sergei Kucheyev and Jim Williams and J. Zou and Pearton, {S J} and Y Nakagawa",

year = "2001",

doi = "10.1063/1.1388881",

language = "English",

volume = "79",

pages = "602--604",

journal = "Applied Physics Letters",

publisher = "American Institute of Physics (AIP)",

number = "5",

}