IMPLICATIONS OF THE SOLID-PHASE AMORPHOUS TO CRYSTALLINE TRANSFORMATION FOR SHALLOW-JUNCTION PROCESSING.

D. M. Maher^*, T. E. Seidel, J. S. Williams, R. G. Elliman, R. V. Knoell, M. B. Ellington, R. Hull, D. C. Jacobson

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review