IMPLICATIONS OF THE SOLID-PHASE AMORPHOUS TO CRYSTALLINE TRANSFORMATION FOR SHALLOW-JUNCTION PROCESSING.
- D. M. Maher*
- , T. E. Seidel
- , J. S. Williams
- , R. G. Elliman
- , R. V. Knoell
- , M. B. Ellington
- , R. Hull
- , D. C. Jacobson
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
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