Improved method for hot embossing As2S3 waveguides employing a thermally stable chalcogenide coating

Ting Han; Steve Madden; Sukhanta Debbarma; Barry Luther-Davies

doi:10.1364/OE.19.025447

Improved method for hot embossing As₂S₃ waveguides employing a thermally stable chalcogenide coating

Ting Han^*, Steve Madden, Sukhanta Debbarma, Barry Luther-Davies

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

20 Citations (Scopus)

Abstract

We demonstrate the fabrication of As₂S₃ rib waveguides using hot embossing. Because of the high temperature required, a thin (50nm) Ge_11.5As₂₄Se_64.5 was thermally evaporated on top of an 870nm As₂S₃ layer to protect against surface degradation during embossing. The waveguides propagation loss was 0.52dB/cm for the TE and 0.41dB/cm for the TM polarizations at 1550nm for a waveguide cross-section dimension of 3.8 × 1μm. The nonlinearity of a 2.2μm wide waveguide was shown to be 13500W^-1km^-1 using four-wave mixing demonstrating that these embossed waveguides were capable of being used for all-optical processing.

Original language	English
Pages (from-to)	25447-25453
Number of pages	7
Journal	Optics Express
Volume	19
Issue number	25
DOIs	https://doi.org/10.1364/OE.19.025447
Publication status	Published - 5 Dec 2011

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abstract = "We demonstrate the fabrication of As2S3 rib waveguides using hot embossing. Because of the high temperature required, a thin (50nm) Ge11.5As24Se64.5 was thermally evaporated on top of an 870nm As2S3 layer to protect against surface degradation during embossing. The waveguides propagation loss was 0.52dB/cm for the TE and 0.41dB/cm for the TM polarizations at 1550nm for a waveguide cross-section dimension of 3.8 × 1μm. The nonlinearity of a 2.2μm wide waveguide was shown to be 13500W-1km-1 using four-wave mixing demonstrating that these embossed waveguides were capable of being used for all-optical processing.",

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AU - Luther-Davies, Barry

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N2 - We demonstrate the fabrication of As2S3 rib waveguides using hot embossing. Because of the high temperature required, a thin (50nm) Ge11.5As24Se64.5 was thermally evaporated on top of an 870nm As2S3 layer to protect against surface degradation during embossing. The waveguides propagation loss was 0.52dB/cm for the TE and 0.41dB/cm for the TM polarizations at 1550nm for a waveguide cross-section dimension of 3.8 × 1μm. The nonlinearity of a 2.2μm wide waveguide was shown to be 13500W-1km-1 using four-wave mixing demonstrating that these embossed waveguides were capable of being used for all-optical processing.

AB - We demonstrate the fabrication of As2S3 rib waveguides using hot embossing. Because of the high temperature required, a thin (50nm) Ge11.5As24Se64.5 was thermally evaporated on top of an 870nm As2S3 layer to protect against surface degradation during embossing. The waveguides propagation loss was 0.52dB/cm for the TE and 0.41dB/cm for the TM polarizations at 1550nm for a waveguide cross-section dimension of 3.8 × 1μm. The nonlinearity of a 2.2μm wide waveguide was shown to be 13500W-1km-1 using four-wave mixing demonstrating that these embossed waveguides were capable of being used for all-optical processing.

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Improved method for hot embossing As₂S₃ waveguides employing a thermally stable chalcogenide coating

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