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Improved Silicon Surface Passivation of APCVD Al2O3 by Rapid Thermal Annealing

  • Lachlan E. Black*
  • , Thomas Allen
  • , Keith R. McIntosh
  • , Andres Cuévas
    • *Corresponding author for this work

    Research output: Contribution to journal › Conference article › peer-review

    8 Citations (Scopus)

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