Abstract
We investigate vertical and defect-free growth of GaAs nanowires on Si (111) substrates via a vapor-liquid-solid (VLS) growth mechanism with Au catalysts by metal-organic chemical vapor deposition (MOCVD). By using annealed thin GaAs buffer layers on the surface of Si substrates, most nanowires are grown on the substrates straight, following (111) direction; by using two temperature growth, the nanowires were grown free from structural defects, such as twin defects and stacking faults. Systematic experiments about buffer layers indicate that V/III ratio of precursor and growth temperature can affect the morphology and quality of the buffer layers. Especially, heterostructural buffer layers grown with different V/III ratios and temperatures and in-situ post-annealing step are very helpful to grow well arranged, vertical GaAs nanowires on Si substrates. The initial nanowires having some structural defects can be defect-free by two-temperature growth mode with improved optical property, which shows us positive possibility for optoelectronic device application.
| Original language | English |
|---|---|
| Title of host publication | 2010 10th IEEE Conference on Nanotechnology, NANO 2010 |
| Place of Publication | Ilsan, Korea (South) |
| Publisher | IEEE |
| Pages | 470-473 |
| ISBN (Print) | 9781424470334 |
| DOIs | |
| Publication status | Published - 2010 |
| Event | 2010 10th IEEE Conference on Nanotechnology, NANO 2010 - Ilsan, Gyeonggi-Do, Korea, Republic of Duration: 17 Aug 2010 → 20 Aug 2010 |
Conference
| Conference | 2010 10th IEEE Conference on Nanotechnology, NANO 2010 |
|---|---|
| Country/Territory | Korea, Republic of |
| City | Ilsan, Gyeonggi-Do |
| Period | 17/08/10 → 20/08/10 |
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