Skip to main navigation Skip to search Skip to main content

Impurity gettering by silicon nitride films: kinetics, mechanisms and simulation

    Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › peer-review

    Fingerprint

    Dive into the research topics of 'Impurity gettering by silicon nitride films: kinetics, mechanisms and simulation'. Together they form a unique fingerprint.
    Sort by

    Material Science

    Chemical Engineering