In-situ electrical probing of zones of nanoindentation-induced phases of silicon

S. Ruffell*, J. E. Bradby, J. S. Williams, R. C. Major, O. L. Warren

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    2 Citations (Scopus)


    Phase transformed zones of silicon have been formed by nanoindentation both at the micro- and nanoscale and electrically probed using an in-situ measurement system. Zones composed of the high pressure crystalline phases (Si-IH/Si-XII) have higher conductivity than those of amorphous silicon (a-Si). At the microscale probing laterally across the surface shows that the conductivity varies within the zones composed of the high pressure phases. The sensitivity to the different conductivities of the two phases allows mapping within the zones. Finally, at the nanoscale the conductivity of the high pressure phase zones can be correlated with the position of the pop-out associated with the formation of the phases. The zones have higher conductivity when the pop-out occurs earlier on unloading and we suggest that this is due to the reduction in trace volumes of a-Si formed during the early portion of the unloading cycle.

    Original languageEnglish
    Title of host publicationIn-Situ Studies Across Spatial and Temporal Scales for Nanoscience and Technology
    PublisherMaterials Research Society
    Number of pages6
    ISBN (Print)9781615677726
    Publication statusPublished - 2008
    Event2008 MRS Fall Meeting - Boston, MA, United States
    Duration: 1 Dec 20085 Dec 2008

    Publication series

    NameMaterials Research Society Symposium Proceedings
    ISSN (Print)0272-9172


    Conference2008 MRS Fall Meeting
    Country/TerritoryUnited States
    CityBoston, MA


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