@inproceedings{cb3ec1c88b57416c8720bc5d7f4b197b,
title = "Industrially Relevant Al2O3 Deposition Techniques for the Surface Passivation of Si Solar Cells",
author = "Jan Schmidt and Florian Werner and Boris Veith and Dimitri Zielke and Robert Bock and Veronica Tiba and Paul Poodt and Fred Roozeboom and Li, {Tsu-Tsung (Andrew)} and Andres Cuevas and Rolf Brendel",
year = "2010",
doi = "10.4229/25thEUPVSEC2010-2AO.1.6",
language = "English",
isbn = "3936338264",
pages = "1130--1133",
editor = "{Conference Program Committee}",
booktitle = "Proceedings of the European Photovoltaic Solar Energy Conference 2010",
publisher = "Conference Organising Committee",
edition = "Peer Reviewed",
note = "European Photovoltaic Solar Energy Conference 2010 ; Conference date: 01-01-2010",
}