Abstract
Influence of rapid thermal annealing on a 30 stack InAs/GaAs quantum dot infrared photodetector (QDIP) was studied. Temperatures in the range of 600-800°C for 60 s, typical of atomic interdiffusion were used. The devices exhibited large dark currents after rapid thermal annealing.
Original language | English |
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Pages (from-to) | 5283-5289 |
Number of pages | 7 |
Journal | Journal of Applied Physics |
Volume | 94 |
Issue number | 8 |
DOIs | |
Publication status | Published - 15 Oct 2003 |