Infrared and terahertz spectrally adaptive filters based on MEMS technologies

Mariusz Martyniuk*, K. K.M.B.Dilusha Silva, Hemendra Kala, Michal Zawierta, Vincent P. Wallace, Konrad Walus, Lorenzo Faraone, Ilya V. Shadrivov

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


    Future remote imaging systems promise spectroscopic functionalities extending well beyond the visible wavelengths. This allows real-time spectral information to be gathered from multiple wavelength bands which is highly attractive for numerous remote sensing spectroscopy/imaging applications and aids target recognition. This paper briefly presents a micro-electromechanical systems (MEMS) based electrically tuneable adaptive filter technology developed for the technologically important infrared (IR) bands of the electromagnetic spectrum and reports on the progress towards extension to the significantly longer wavelength THz band. The demonstrated concepts focus on merging MEMS-enabled dynamic modulation with the spectral sensitivity and selectivity of metamaterials, as well as on the possibility of adopting the rapidly evolving 3D printing technologies.

    Original languageEnglish
    Title of host publicationSmart Photonic and Optoelectronic Integrated Circuits 2023
    EditorsSailing He, Sailing He, Laurent Vivien
    ISBN (Electronic)9781510659551
    Publication statusPublished - 2023
    EventSmart Photonic and Optoelectronic Integrated Circuits 2023 - San Francisco, United States
    Duration: 31 Jan 20232 Feb 2023

    Publication series

    NameProceedings of SPIE - The International Society for Optical Engineering
    ISSN (Print)0277-786X
    ISSN (Electronic)1996-756X


    ConferenceSmart Photonic and Optoelectronic Integrated Circuits 2023
    Country/TerritoryUnited States
    CitySan Francisco


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