Interdiffused quantum-well infrared photodetectors for color sensitive arrays

M. B. Johnston*, M. Gal, Na Li, Zhanghai Chen, Xingquan Liu, Ning Li, Wei Lu, S. C. Shen, L. Fu, H. H. Tan, C. Jagadish

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    22 Citations (Scopus)

    Abstract

    Proton implantation and rapid thermal annealing were used to tune the infrared spectral response of quantum-well infrared photodetectors (QWIP) by up to 1.4 μm. Multiple proton implants at energies between 200 and 420 keV were used to create homogeneous quantum-well intermixing throughout the device's multiple-quantum-well structure. Photoluminescence and spectral response measurements were used to study the effect of proton implantation on QWIPs for a series of doses up to 3.5 X 1015 protons cm-2. By using a mask during implantation, a method of constructing a color sensitive array is proposed.

    Original languageEnglish
    Pages (from-to)923-925
    Number of pages3
    JournalApplied Physics Letters
    Volume75
    Issue number7
    DOIs
    Publication statusPublished - 16 Aug 1999

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