Interstitial oxygen imaging from thermal donor growth - A fast photoluminescence based method

T. Niewelt; S. Lim; J. Holtkamp; J. Schön; W. Warta; D. Macdonald; M. C. Schubert

doi:10.1016/j.solmat.2014.05.011

Interstitial oxygen imaging from thermal donor growth - A fast photoluminescence based method

T. Niewelt^*, S. Lim, J. Holtkamp, J. Schön, W. Warta, D. Macdonald, M. C. Schubert

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

We present a fast method to create interstitial oxygen concentration maps from resistivity calibrated photoluminescence images prior to and after a heat treatment at 450 °C. The method utilizes the influence of thermal donors on the effective doping concentration of a sample. Although the determination of thermal donor concentrations from conductivity measurements is customary in literature, we found that implementation of a mobility model is necessary to determine accurate concentrations of thermal donors. Therefore an iterative correction algorithm is presented, which allows precise determination of thermal donor concentrations from resistivity measurements. The determination of interstitial oxygen concentrations from thermal donor concentrations is based on an updated parameterization based on a model of Wada et al. (Phys. Rev. B: Condens. Matter 30 (1984) 5884-5895) that is also presented in this paper. The method is demonstrated on a 1.3 Ω cm p-type Czochralski grown silicon sample with an interstitial oxygen concentration in the range of 7.5×10¹⁷ cm^-3 and yields good agreement with FTIR measurements.

Original language	English
Pages (from-to)	117-123
Number of pages	7
Journal	Solar Energy Materials and Solar Cells
Volume	131
DOIs	https://doi.org/10.1016/j.solmat.2014.05.011
Publication status	Published - Dec 2014

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title = "Interstitial oxygen imaging from thermal donor growth - A fast photoluminescence based method",

abstract = "We present a fast method to create interstitial oxygen concentration maps from resistivity calibrated photoluminescence images prior to and after a heat treatment at 450 °C. The method utilizes the influence of thermal donors on the effective doping concentration of a sample. Although the determination of thermal donor concentrations from conductivity measurements is customary in literature, we found that implementation of a mobility model is necessary to determine accurate concentrations of thermal donors. Therefore an iterative correction algorithm is presented, which allows precise determination of thermal donor concentrations from resistivity measurements. The determination of interstitial oxygen concentrations from thermal donor concentrations is based on an updated parameterization based on a model of Wada et al. (Phys. Rev. B: Condens. Matter 30 (1984) 5884-5895) that is also presented in this paper. The method is demonstrated on a 1.3 Ω cm p-type Czochralski grown silicon sample with an interstitial oxygen concentration in the range of 7.5×1017 cm-3 and yields good agreement with FTIR measurements.",

keywords = "Interstitial oxygen, Mobility correction, Photoluminescence imaging, Thermal donors",

author = "T. Niewelt and S. Lim and J. Holtkamp and J. Sch{\"o}n and W. Warta and D. Macdonald and Schubert, {M. C.}",

note = "Publisher Copyright: {\textcopyright} 2014 Elsevier B.V.",

year = "2014",

month = dec,

doi = "10.1016/j.solmat.2014.05.011",

language = "English",

volume = "131",

pages = "117--123",

journal = "Solar Energy Materials and Solar Cells",

issn = "0927-0248",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Interstitial oxygen imaging from thermal donor growth - A fast photoluminescence based method

AU - Niewelt, T.

AU - Lim, S.

AU - Holtkamp, J.

AU - Schön, J.

AU - Warta, W.

AU - Macdonald, D.

AU - Schubert, M. C.

PY - 2014/12

Y1 - 2014/12

N2 - We present a fast method to create interstitial oxygen concentration maps from resistivity calibrated photoluminescence images prior to and after a heat treatment at 450 °C. The method utilizes the influence of thermal donors on the effective doping concentration of a sample. Although the determination of thermal donor concentrations from conductivity measurements is customary in literature, we found that implementation of a mobility model is necessary to determine accurate concentrations of thermal donors. Therefore an iterative correction algorithm is presented, which allows precise determination of thermal donor concentrations from resistivity measurements. The determination of interstitial oxygen concentrations from thermal donor concentrations is based on an updated parameterization based on a model of Wada et al. (Phys. Rev. B: Condens. Matter 30 (1984) 5884-5895) that is also presented in this paper. The method is demonstrated on a 1.3 Ω cm p-type Czochralski grown silicon sample with an interstitial oxygen concentration in the range of 7.5×1017 cm-3 and yields good agreement with FTIR measurements.

AB - We present a fast method to create interstitial oxygen concentration maps from resistivity calibrated photoluminescence images prior to and after a heat treatment at 450 °C. The method utilizes the influence of thermal donors on the effective doping concentration of a sample. Although the determination of thermal donor concentrations from conductivity measurements is customary in literature, we found that implementation of a mobility model is necessary to determine accurate concentrations of thermal donors. Therefore an iterative correction algorithm is presented, which allows precise determination of thermal donor concentrations from resistivity measurements. The determination of interstitial oxygen concentrations from thermal donor concentrations is based on an updated parameterization based on a model of Wada et al. (Phys. Rev. B: Condens. Matter 30 (1984) 5884-5895) that is also presented in this paper. The method is demonstrated on a 1.3 Ω cm p-type Czochralski grown silicon sample with an interstitial oxygen concentration in the range of 7.5×1017 cm-3 and yields good agreement with FTIR measurements.

KW - Interstitial oxygen

KW - Mobility correction

KW - Photoluminescence imaging

KW - Thermal donors

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U2 - 10.1016/j.solmat.2014.05.011

DO - 10.1016/j.solmat.2014.05.011

M3 - Article

SN - 0927-0248

VL - 131

SP - 117

EP - 123

JO - Solar Energy Materials and Solar Cells

JF - Solar Energy Materials and Solar Cells

ER -

Interstitial oxygen imaging from thermal donor growth - A fast photoluminescence based method

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