ION BEAM-INDUCED DAMAGING AND DYNAMIC ANNEALING PROCESSES IN SILICON.

K. T. Short^*, D. J. Chivers, R. G. Elliman, J. Liu, A. P. Pogany, H. Wagenfeld, J. S. Williams

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › peer-review

9 Citations (Scopus)

Original language	English
Title of host publication	Materials Research Society Symposia Proceedings
Publisher	North Holland
Pages	247-252
Number of pages	6
ISBN (Print)	0444008691
Publication status	Published - 1984

Name	Materials Research Society Symposia Proceedings
Volume	27
ISSN (Print)	0272-9172

Cite this

@inproceedings{b91d3230d908439bb4fbd9e014873b81,

title = "ION BEAM-INDUCED DAMAGING AND DYNAMIC ANNEALING PROCESSES IN SILICON.",

author = "Short, \{K. T.\} and Chivers, \{D. J.\} and Elliman, \{R. G.\} and J. Liu and Pogany, \{A. P.\} and H. Wagenfeld and Williams, \{J. S.\}",

year = "1984",

language = "English",

isbn = "0444008691",

series = "Materials Research Society Symposia Proceedings",

publisher = "North Holland",

pages = "247--252",

booktitle = "Materials Research Society Symposia Proceedings",

}

TY - GEN

T1 - ION BEAM-INDUCED DAMAGING AND DYNAMIC ANNEALING PROCESSES IN SILICON.

AU - Short, K. T.

AU - Chivers, D. J.

AU - Elliman, R. G.

AU - Liu, J.

AU - Pogany, A. P.

AU - Wagenfeld, H.

AU - Williams, J. S.

PY - 1984

Y1 - 1984

UR - https://www.scopus.com/pages/publications/0021290836

M3 - Conference Paper

AN - SCOPUS:0021290836

SN - 0444008691

T3 - Materials Research Society Symposia Proceedings

SP - 247

EP - 252

BT - Materials Research Society Symposia Proceedings

PB - North Holland

ER -