Ion-beam modifiction of semiconductors and related electronic materials

This paper reviews the ion-implantation research program at the Australian National University. The emphasis of the research is on the modification and analysis of semiconductors and related electronic and optoelectronic materials, and includes both device and materials based studies. These are discussed under the headings: a) solid-phase epitaxy, b) defect engineering, doping and gettering, c) the synthesis of alloys and compounds, and d) optical materials.