Skip to main navigation Skip to search Skip to main content

Ion implantation into GaN

  • S. O. Kucheyev*
  • , J. S. Williams
  • , S. J. Pearton
  • *Corresponding author for this work

    Research output: Contribution to journalReview articlepeer-review

    417 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Ion implantation into GaN'. Together they form a unique fingerprint.
    Sort by

    Material Science

    Medicine and Dentistry