Ion track formation and porosity in InSb induced by swift heavy ion irradiation

Taleb Alwadi; Christian Notthoff; Shankar Dutt; Jessica Wierbik; Nahid Afrin; Alexander Kiy; Patrick Kluth

doi:10.1116/6.0003007

Ion track formation and porosity in InSb induced by swift heavy ion irradiation

Taleb Alwadi^*, Christian Notthoff, Shankar Dutt, Jessica Wierbik, Nahid Afrin, Alexander Kiy, Patrick Kluth

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

Ion track formation, irradiation-induced damage (amorphization), and the formation of porosity in InSb after 185 MeV ¹⁹⁷Au swift heavy ion irradiation are studied as a function of ion fluence and irradiation angle. Rutherford backscattering spectrometry in channeling geometry reveals an ion track radius of about 16 nm for irradiation normal to the surface and 21 nm for off-normal irradiation at 30° and 60°. Cross-sectional scanning electron microscopy shows significant porosity that increases when irradiation was performed off-normal to the surface. Off-normal irradiation shows a preferential orientation of the pores at about 45° relative to the surface normal. Moreover, when subjected to identical conditions, InSb samples demonstrate notably higher swelling compared to GaSb bulk samples.

Original language	English
Article number	063404
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	41
Issue number	6
DOIs	https://doi.org/10.1116/6.0003007
Publication status	Published - 1 Dec 2023

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title = "Ion track formation and porosity in InSb induced by swift heavy ion irradiation",

abstract = "Ion track formation, irradiation-induced damage (amorphization), and the formation of porosity in InSb after 185 MeV 197Au swift heavy ion irradiation are studied as a function of ion fluence and irradiation angle. Rutherford backscattering spectrometry in channeling geometry reveals an ion track radius of about 16 nm for irradiation normal to the surface and 21 nm for off-normal irradiation at 30° and 60°. Cross-sectional scanning electron microscopy shows significant porosity that increases when irradiation was performed off-normal to the surface. Off-normal irradiation shows a preferential orientation of the pores at about 45° relative to the surface normal. Moreover, when subjected to identical conditions, InSb samples demonstrate notably higher swelling compared to GaSb bulk samples.",

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T1 - Ion track formation and porosity in InSb induced by swift heavy ion irradiation

AU - Alwadi, Taleb

AU - Notthoff, Christian

AU - Dutt, Shankar

AU - Wierbik, Jessica

AU - Afrin, Nahid

AU - Kiy, Alexander

AU - Kluth, Patrick

PY - 2023/12/1

Y1 - 2023/12/1

N2 - Ion track formation, irradiation-induced damage (amorphization), and the formation of porosity in InSb after 185 MeV 197Au swift heavy ion irradiation are studied as a function of ion fluence and irradiation angle. Rutherford backscattering spectrometry in channeling geometry reveals an ion track radius of about 16 nm for irradiation normal to the surface and 21 nm for off-normal irradiation at 30° and 60°. Cross-sectional scanning electron microscopy shows significant porosity that increases when irradiation was performed off-normal to the surface. Off-normal irradiation shows a preferential orientation of the pores at about 45° relative to the surface normal. Moreover, when subjected to identical conditions, InSb samples demonstrate notably higher swelling compared to GaSb bulk samples.

AB - Ion track formation, irradiation-induced damage (amorphization), and the formation of porosity in InSb after 185 MeV 197Au swift heavy ion irradiation are studied as a function of ion fluence and irradiation angle. Rutherford backscattering spectrometry in channeling geometry reveals an ion track radius of about 16 nm for irradiation normal to the surface and 21 nm for off-normal irradiation at 30° and 60°. Cross-sectional scanning electron microscopy shows significant porosity that increases when irradiation was performed off-normal to the surface. Off-normal irradiation shows a preferential orientation of the pores at about 45° relative to the surface normal. Moreover, when subjected to identical conditions, InSb samples demonstrate notably higher swelling compared to GaSb bulk samples.

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DO - 10.1116/6.0003007

M3 - Article

SN - 0734-2101

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JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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ER -

Ion track formation and porosity in InSb induced by swift heavy ion irradiation

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