Kinetic model for plasma-based ion implantation of a short, cylindrical tube with auxiliary electrode

Plasma-based ion implantation of the inner surface of a short, cylindrical tube is modeled using a two-dimensional particle-in-cell simulation. An auxiliary electrode, here a coaxial anode, is used to increase the ion impact energy. Initially, ions inside the tube impact the inner surface at approximately normal angles. At later times, ions enter the tube from the exterior plasma and impact predominantly near its center at glancing angles. Ions are found to cross the midplane of the tube and in some cases to pass completely through the tube, in contrast to the predictions of the "collisionless" fluid model. The total incident dose is greatest around the center of the tube, and least at its ends.