TY - GEN
T1 - Large area macroporous silicon layers for monocrystalline thin-film solar cells
AU - Ernst, Marco
AU - Brendel, Rolf
PY - 2010
Y1 - 2010
N2 - We produce uniform macroporous double-layers on 6 inch n-type silicon substrates by electrochemical etching under rear side illumination in a hydrofluoric acid (HF)-based electrolyte. The etched area is circular with a diameter of 13 cm. We demonstrate the detachment of 20 μm thick free-standing macroporous silicon layers with an area of 8 × 8 cm2.
AB - We produce uniform macroporous double-layers on 6 inch n-type silicon substrates by electrochemical etching under rear side illumination in a hydrofluoric acid (HF)-based electrolyte. The etched area is circular with a diameter of 13 cm. We demonstrate the detachment of 20 μm thick free-standing macroporous silicon layers with an area of 8 × 8 cm2.
UR - http://www.scopus.com/inward/record.url?scp=78650141572&partnerID=8YFLogxK
U2 - 10.1109/PVSC.2010.5614496
DO - 10.1109/PVSC.2010.5614496
M3 - Conference contribution
SN - 9781424458912
T3 - Conference Record of the IEEE Photovoltaic Specialists Conference
SP - 3122
EP - 3124
BT - Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010
T2 - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010
Y2 - 20 June 2010 through 25 June 2010
ER -